Ngokuthuthuka okusheshayo kwe-5G, ubuhlakani bokufakelwa (AI) kanye ne-Intanethi Yezinto (IoT), isidingo sezinto ezisebenza kahle embonini ye-semiconductor senyuke kakhulu.I-Zirconium tetrachloride (ZrCl₄), njengempahla ebalulekile ye-semiconductor, isiphenduke into eluhlaza engadingeki kuma-chips enqubo ethuthukisiwe (njenge-3nm/2nm) ngenxa yendima yayo ebalulekile ekulungiseleleni amafilimu e-high-k.
I-Zirconium tetrachloride namafilimu aphezulu-k
Ekwenziweni kwe-semiconductor, amafilimu e-high-k angenye yezinto ezibalulekile zokuthuthukisa ukusebenza kwe-chip. Njengoba inqubo yokuncipha okuqhubekayo kwezinto zokwakha zesango le-silicon-based dielectric (ezifana ne-SiO₂), ukujiya kwazo kusondela emkhawulweni ongokomzimba, okuholela ekwenyukeni kokuvuza kanye nokwanda okukhulu kokusetshenziswa kwamandla. Izinto ze-High-k (ezifana ne-zirconium oxide, i-hafnium oxide, njll.) zingakhuphula ngempumelelo ukujiya komzimba kwesendlalelo se-dielectric, zinciphise umphumela womhubhe, futhi ngaleyo ndlela zithuthukise ukuzinza nokusebenza kwemishini kagesi.
I-Zirconium tetrachloride iyisandulela esibalulekile sokulungiswa kwamafilimu aphezulu-k. I-Zirconium tetrachloride ingaguqulwa ibe amafilimu e-zirconium oxide aphezulu ngezinqubo ezifana ne-chemical vapor deposition (CVD) noma i-atomic layer deposition (ALD). Lawa mafilimu anezakhiwo ezinhle kakhulu ze-dielectric futhi angathuthukisa kakhulu ukusebenza nokusebenza kahle kwama-chips. Isibonelo, i-TSMC yethule izinhlobonhlobo zezinto ezintsha kanye nokuthuthukiswa kwenqubo kunqubo yayo ye-2nm, okuhlanganisa ukusetshenziswa kwamafilimu aphezulu e-dielectric njalo, azuze ukwanda kwe-transistor density kanye nokunciphisa ukusetshenziswa kwamandla.
I-Global Supply Chain Dynamics
Ochungechungeni lokuhlinzeka nge-semiconductor yomhlaba wonke, iphethini yokuhlinzeka nokukhiqiza yei-zirconium tetrachloridezibalulekile ekuthuthukisweni kwemboni. Njengamanje, amazwe nezifunda ezifana ne-China, i-United States kanye ne-Japan athatha isikhundla esibalulekile ekukhiqizeni i-zirconium tetrachloride kanye nezinto ezihlobene ne-dielectric ephezulu engaguquki.
Ukuthuthuka kwezobuchwepheshe namathemba esikhathi esizayo
Ukuphumelela kwezobuchwepheshe yizici ezibalulekile ekukhuthazeni ukusetshenziswa kwe-zirconium tetrachloride embonini ye-semiconductor. Eminyakeni yakamuva, inqubo yokwenza ngcono ye-atomic layer deposition (ALD) isiphenduke indawo yocwaningo. Inqubo ye-ALD ingakwazi ukulawula ngokunembile ukujiya nokufana kwefilimu ku-nanoscale, ngaleyo ndlela ithuthukise ikhwalithi yamafilimu aphezulu e-dielectric njalo. Isibonelo, iqembu locwaningo lika-Liu Lei wase-Peking University lilungiselele ifilimu ye-dielectric engaguquki ye-amorphous esebenzisa indlela yamakhemikhali emanzi futhi yayisebenzisa ngempumelelo kumishini kagesi ye-semiconductor enezinhlangothi ezimbili.
Ukwengeza, njengoba izinqubo ze-semiconductor ziqhubeka nokuthuthukela kumasayizi amancane, ububanzi besicelo se-zirconium tetrachloride nabo bayakhula. Isibonelo, i-TSMC ihlela ukuzuza ukukhiqizwa ngobuningi kobuchwepheshe be-2nm engxenyeni yesibili ka-2025, futhi i-Samsung nayo ikhuthaza ngenkuthalo ucwaningo nokuthuthukiswa kwenqubo yayo ye-2nm. Ukugcwaliseka kwalezi zinqubo ezithuthukisiwe akunakuhlukaniswa nokusekelwa kwamafilimu ahlala e-high-dielectric, futhi i-zirconium tetrachloride, njengento eyinhloko eluhlaza, inokubaluleka okubonakalayo.
Kafushane, indima ebalulekile ye-zirconium tetrachloride embonini ye-semiconductor iya ngokuya igqama. Ngokuthandwa kwe-5G, AI kanye Ne-inthanethi Yezinto, isidingo sama-chips asebenza kahle siyaqhubeka nokwanda. I-Zirconium tetrachloride, njengesandulela esibalulekile samafilimu ahlala njalo ane-dielectric, izodlala indima engenakushintshwa ekukhuthazeni ukuthuthukiswa kobuchwepheshe be-chip besizukulwane esilandelayo. Ngokuzayo, ngokuthuthuka okuqhubekayo kobuchwepheshe kanye nokwenza kahle kwe-global supply chain, amathuba okusetshenziswa kwe-zirconium tetrachloride azoba banzi.
Isikhathi sokuthumela: Apr-14-2025